SoLayTec, ISFH reach 20.1% efficiency with PERC solar cell

Sep 25, 2013 - Dutch firm SoLayTec and the Institute for Solar Energy Research in Hamelin (ISFH) in Germany said Tuesday they have achieved 20.1% efficiency with a passivated emitter and rear cells (PERC) solar cell.

Using the spatial atomic layer deposition (ALD) method, the research partners have applied a 5-nm aluminum oxide (Al2O3) layer as rear passivation of industrial-type PERC solar cells to reach the efficiency result. “Our advanced device simulations show that efficiencies up to 21% will be achievable,” said Jan Schmidt, head of ISFH’s photovoltaic (PV) department.

ISFH and SoLayTec explained that up to now the spatial ALD process involved a post deposition anneal (PDA) following the Al2O3 deposition phase. The research partners have come to the conclusion that PERC cells with efficiency of over 20% do not require the PDA process thus the manufacturing equipment costs are reduced. The 5-nm thickness of the Al2O3 as compared to 20 to 25 nm for other processes is also an advantage. Roger Goertzen, head of marketing and sales and co-founder of SoLayTec, says that the cost for Al2O3 layers can fall below EUR 0.02 per wafer in mass production using the InPassion ALD from SoLayTec.

SoLayTec, a spin-off from Dutch research organisation TNO, develops, delivers and services machines for atomic layer deposition (ALD) on solar cells globally.

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